Importance

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Abstract

A method for fabricating a nozzle plate having three dimensional features is provided. On a conductive surface, a plurality of non-conductive masked areas of selected dimensions are formed at locations corresponding to the locations of the holes of the desired nozzle plate. A layer of a first metal is electroformed onto the conductive surface until the layer of the first metal overgrows the masked areas by a selected amount. A first layer of a second metal is then electroformed over the layer of the first metal until a plurality of holes having diameters corresponding to the diameters of the holes of the desired nozzle plate are formedin the first layer of the second metal. Depressions formed in the first and second metal layers during the plating process are filled with a planarizing filler. A second layer of the second metal is then electroformed onto the first layer of the second metal to form a plurality of holes in registration with the depressions. Each hole formed in the second layer of the second metal has a selected diameter larger than the holes formed in the first layer of the second metal. The metal layers are then removed from the conductive surface and the non-conductive masked areas and the layer of the first metal are removed from the first and second layers of the second metal.

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First Claim