US Patent No: 4,954,789

Number of patents in Portfolio can not be more than 2000

Spatial light modulator

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ATTORNEY / AGENT: (SPONSORED)
 

Importance

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Abstract

An electrostatically deflectable plate spatial light modulator with light reflecting plates (106) composed of aluminum alloy and with symmetrically located supporting hinges (108) connecting the plates (106) to support posts (104); this provides a thick stiff plate and a thin compliant hinges with deflection perpendicular to the plane of the plates.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TEXAS INSTRUMENTS INCORPORATEDDALLAS, TX17098

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sampsell, Jeffrey B San Jose, CA 220 12065

Cited Art

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (5)
4,566,935 Spatial light modulator and method 477 1984
4,710,732 Spatial light modulator and method 468 1984
4,596,992 Linear spatial light modulator and printer 361 1984
4,615,595 Frame addressed spatial light modulator 377 1984
4,662,746 Spatial light modulator and method 471 1985
 
CANON KABUSHIKI KAISHA (1)
4,842,396 Light modulation element and light modulation apparatus 17 1985
 
The United States of America as represented by the Secretary of the Air Force (1)
4,698,602 Micromirror spatial light modulator 89 1985
 
XEROX CORPORATION (1)
4,492,435 Multiple array full width electro mechanical modulator 154 1982

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (351)
7,123,216 Photonic MEMS and structures 484 1999
7,138,984 Directly laminated touch sensitive screen 90 2001
7,042,643 Interferometric modulation of radiation 155 2002
7,126,738 Visible spectrum modulator arrays 116 2002
7,110,158 Photonic MEMS and structures 158 2002
7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer 20 2002
7,297,471 Method for manufacturing an array of interferometric modulators 17 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 93 2003
7,460,291 Separable modulator 42 2003
7,012,726 MEMS devices with unreleased thin film components 65 2003
7,198,973 Method for fabricating an interference display unit 89 2003
7,161,728 Area array modulation and lead reduction in interferometric modulators 130 2003
7,692,844 Interferometric modulation of radiation 10 2004
7,532,194 Driver voltage adjuster 3 2004
7,119,945 Altering temporal response of microelectromechanical elements 120 2004
7,706,050 Integrated modulator illumination 27 2004
7,193,768 Interference display cell 22 2004
7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof 25 2004
7,476,327 Method of manufacture for microelectromechanical devices 29 2004
7,060,895 Modifying the electro-mechanical behavior of devices 38 2004
7,280,265 Interferometric modulation of radiation 40 2004
7,164,520 Packaging for an interferometric modulator 30 2004
7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device 45 2004
7,893,919 Display region architectures 2 2005
7,813,026 System and method of reducing color shift in a display 10 2005
7,551,159 System and method of sensing actuation and release voltages of an interferometric modulator 11 2005
7,424,198 Method and device for packaging a substrate 2 2005
7,142,346 System and method for addressing a MEMS display 27 2005
7,515,147 Staggered column drive circuit systems and methods 9 2005
7,379,227 Method and device for modulating light 10 2005
7,355,780 System and method of illuminating interferometric modulators using backlighting 35 2005
7,289,259 Conductive bus structure for interferometric modulator array 55 2005
7,460,246 Method and system for sensing light using interferometric elements 8 2005
7,560,299 Systems and methods of actuating MEMS display elements 7 2005
7,012,732 Method and device for modulating light with a time-varying signal 53 2005
7,359,066 Electro-optical measurement of hysteresis in interferometric modulators 7 2005
7,701,631 Device having patterned spacers for backplates and method of making the same 2 2005
7,259,449 Method and system for sealing a substrate 12 2005
7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device 3 2005
7,668,415 Method and device for providing electronic circuitry on a backplate 5 2005
7,429,334 Methods of fabricating interferometric modulators by selectively removing a material 12 2005
7,420,728 Methods of fabricating interferometric modulators by selectively removing a material 15 2005
7,405,924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate 7 2005
7,368,803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion 7 2005
7,299,681 Method and system for detecting leak in electronic devices 1 2005
7,920,135 Method and system for driving a bi-stable display 3 2005
7,679,627 Controller and driver features for bi-stable display 1 2005
7,586,484 Controller and driver features for bi-stable display 13 2005
7,535,466 System with server based control of client device display features 5 2005
7,532,195 Method and system for reducing power consumption in a display 2 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 37 2005
7,289,256 Electrical characterization of interferometric modulators 11 2005
7,602,375 Method and system for writing data to MEMS display elements 0 2005
7,916,103 System and method for display device with end-of-life phenomena 1 2005
7,321,456 Method and device for corner interferometric modulation 32 2005
7,626,581 Device and method for display memory using manipulation of mechanical response 1 2005
7,372,613 Method and device for multistate interferometric light modulation 63 2005
7,889,163 Drive method for MEMS devices 6 2005
7,692,839 System and method of providing MEMS device with anti-stiction coating 1 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 29 2005
7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge 3 2005
7,843,410 Method and device for electrically programmable display 4 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 26 2005
7,547,565 Method of manufacturing optical interference color display 12 2005
7,527,995 Method of making prestructure for MEMS systems 20 2005
7,808,703 System and method for implementation of interferometric modulator displays 2 2005
7,349,136 Method and device for a display having transparent components integrated therein 7 2005
RE42119 Microelectrochemical systems device and method for fabricating same 4 2005
8,008,736 Analog interferometric modulator device 0 2005
7,710,629 System and method for display device with reinforcing substance 3 2005
8,124,434 Method and system for packaging a display 0 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 18 2005
7,471,444 Interferometric modulation of radiation 12 2005
7,388,706 Photonic MEMS and structures 10 2005
7,345,805 Interferometric modulator array with integrated MEMS electrical switches 6 2005
7,196,837 Area array modulation and lead reduction in interferometric modulators 18 2005
7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 53 2005
7,553,684 Method of fabricating interferometric devices using lift-off processing techniques 6 2005
7,417,783 Mirror and mirror layer for optical modulator and method 7 2005
7,373,026 MEMS device fabricated on a pre-patterned substrate 12 2005
7,343,080 System and method of testing humidity in a sealed MEMS device 8 2005
RE40436 Hermetic seal and method to create the same 7 2005
7,304,784 Reflective display device having viewable display on both sides 33 2005
7,161,730 System and method for providing thermal compensation for an interferometric modulator display 78 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 19 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 0 2005
7,317,568 System and method of implementation of interferometric modulators for display mirrors 1 2005
7,310,179 Method and device for selective adjustment of hysteresis window 8 2005
7,724,993 MEMS switches with deforming membranes 0 2005
7,492,502 Method of fabricating a free-standing microstructure 11 2005
7,417,735 Systems and methods for measuring color and contrast in specular reflective devices 24 2005
7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 14 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 10 2005
7,136,213 Interferometric modulators having charge persistence 14 2005
7,564,612 Photonic MEMS and structures 53 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 146 2005
7,369,294 Ornamental display device 38 2005
7,684,104 MEMS using filler material and method 7 2005
7,653,371 Selectable capacitance circuit 10 2005
7,415,186 Methods for visually inspecting interferometric modulators for defects 4 2005
7,675,669 Method and system for driving interferometric modulators 2 2005
7,453,579 Measurement of the dynamic characteristics of interferometric modulators 11 2005
7,545,550 Systems and methods of actuating MEMS display elements 1 2005
8,310,441 Method and system for writing data to MEMS display elements 0 2005
7,446,927 MEMS switch with set and latch electrodes 5 2005
7,486,429 Method and device for multistate interferometric light modulation 8 2005
7,236,284 Photonic MEMS and structures 83 2005
7,630,114 Diffusion barrier layer for MEMS devices 1 2005
8,014,059 System and method for charge control in a MEMS device 0 2005
7,776,631 MEMS device and method of forming a MEMS device 6 2005
7,618,831 Method of monitoring the manufacture of interferometric modulators 0 2005
7,403,323 Process control monitors for interferometric modulators 1 2005
7,369,252 Process control monitors for interferometric modulators 0 2005
7,259,865 Process control monitors for interferometric modulators 20 2005
7,561,334 Method and apparatus for reducing back-glass deflection in an interferometric modulator display device 1 2005
8,391,630 System and method for power reduction when decompressing video streams for interferometric modulator displays 0 2005
7,795,061 Method of creating MEMS device cavities by a non-etching process 1 2005
7,355,779 Method and system for driving MEMS display elements 1 2006
7,916,980 Interconnect structure for MEMS device 0 2006
7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 4 2006
8,194,056 Method and system for writing data to MEMS display elements 0 2006
7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 2 2006
7,547,568 Electrical conditioning of MEMS device and insulating layer thereof 6 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 19 2006
7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 40 2006
7,483,197 Photonic MEMS and structures 16 2006
7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 11 2006
7,532,377 Movable micro-electromechanical device 28 2006
7,643,203 Interferometric optical display system with broadband characteristics 17 2006
7,948,457 Systems and methods of actuating MEMS display elements 0 2006
7,903,047 Mode indicator for interferometric modulator displays 2 2006
7,711,239 Microelectromechanical device and method utilizing nanoparticles 0 2006
7,623,287 Non-planar surface structures and process for microelectromechanical systems 4 2006
7,527,996 Non-planar surface structures and process for microelectromechanical systems 4 2006
7,417,784 Microelectromechanical device and method utilizing a porous surface 42 2006
8,049,713 Power consumption optimized display update 1 2006
7,920,136 System and method of driving a MEMS display device 0 2006
7,706,044 Optical interference display cell and method of making the same 8 2006
7,880,954 Integrated modulator illumination 14 2006
7,369,292 Electrode and interconnect materials for MEMS devices 13 2006
7,349,139 System and method of illuminating interferometric modulators using backlighting 15 2006
8,174,469 Dynamic driver IC and display panel configuration 0 2006
7,161,094 Modifying the electro-mechanical behavior of devices 17 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 74 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 7 2006
7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports 3 2006
7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts 60 2006
7,187,489 Photonic MEMS and structures 79 2006
7,636,151 System and method for providing residual stress test structures 0 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 4 2006
7,702,192 Systems and methods for driving MEMS display 0 2006
7,835,061 Support structures for free-standing electromechanical devices 4 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 42 2006
7,777,715 Passive circuits for de-multiplexing display inputs 2 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 10 2006
7,388,704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 4 2006
7,534,640 Support structure for MEMS device and methods therefor 13 2006
7,830,586 Transparent thin films 10 2006
7,554,711 MEMS devices with stiction bumps 30 2006
7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 3 2006
7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants 24 2006
7,928,940 Drive method for MEMS devices 0 2006
7,301,704 Moveable micro-electromechanical device 9 2006
7,898,722 Microelectromechanical device with restoring electrode 26 2006
7,629,197 Spatial light modulator 27 2006
7,545,552 Sacrificial spacer process and resultant structure for MEMS support structure 4 2006
7,385,748 Visible spectrum modulator arrays 26 2006
7,388,697 System and method for addressing a MEMS display 6 2006
7,242,512 System and method for addressing a MEMS display 7 2006
7,667,884 Interferometric modulators having charge persistence 3 2006
7,385,762 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 40 2006
7,511,875 Moveable micro-electromechanical device 3 2006
7,724,417 MEMS switches with deforming membranes 0 2006
7,556,981 Switches for shorting during MEMS etch release 1 2006
7,489,428 Area array modulation and lead reduction in interferometric modulators 14 2007
7,957,589 Arbitrary power function using logarithm lookup table 0 2007
7,884,989 White interferometric modulators and methods for forming the same 2 2007
7,872,792 Method and device for modulating light with multiple electrodes 4 2007
8,004,514 Method and system for updating of displays showing deterministic content 2 2007
7,733,552 MEMS cavity-coating layers and methods 3 2007
7,742,220 Microelectromechanical device and method utilizing conducting layers separated by stops 7 2007
7,715,080 Packaging a MEMS device using a frame 1 2007
8,059,326 Display devices comprising of interferometric modulator and sensor 1 2007
7,738,156 Display devices comprising of interferometric modulator and sensor 0 2007
7,715,085 Electromechanical system having a dielectric movable membrane and a mirror 4 2007
7,643,202 Microelectromechanical system having a dielectric movable membrane and a mirror 5 2007
7,532,381 Method of making a light modulating display device and associated transistor circuitry and structures thereof 18 2007
7,643,199 High aperture-ratio top-reflective AM-iMod displays 6 2007
7,826,127 MEMS device having a recessed cavity and methods therefor 0 2007
7,782,517 Infrared and dual mode displays 4 2007
7,569,488 Methods of making a MEMS device by monitoring a process parameter 21 2007
7,944,599 Electromechanical device with optical function separated from mechanical and electrical function 1 2007
7,630,121 Electromechanical device with optical function separated from mechanical and electrical function 9 2007
7,612,932 Microelectromechanical device with optical function separated from mechanical and electrical function 14 2007
7,595,926 Integrated IMODS and solar cells on a substrate 10 2007
8,115,987 Modulating the intensity of light from an interferometric reflector 0 2007
7,642,127 Method and system for sealing a substrate 2 2007
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 14 2007
7,723,015 Method for manufacturing an array of interferometeric modulators 10 2007
8,022,896 ESD protection for MEMS display panels 0 2007
7,601,571 Methods of manufacturing interferometric modulators with thin film transistors 1 2007
8,081,369 System and method for a MEMS device 0 2007
7,852,545 Method and device for modulating light 8 2007
7,848,004 System and method for a MEMS device 5 2007
7,839,556 Method and device for modulating light 0 2007
7,830,587 Method and device for modulating light with semiconductor substrate 9 2007
7,826,120 Method and device for multi-color interferometric modulation 8 2007
7,808,694 Method and device for modulating light 8 2007
7,800,809 System and method for a MEMS device 0 2007
7,738,157 System and method for a MEMS device 11 2007
7,629,678 Method and system for sealing a substrate 1 2007
8,072,402 Interferometric optical modulator with broadband reflection characteristics 2 2007
7,492,503 System and method for multi-level brightness in interferometric modulation 19 2007
7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 2 2007
7,605,969 Interferometric modulation of radiation 18 2007
7,564,613 Microelectromechanical device and method utilizing a porous surface 2 2007
7,982,700 Conductive bus structure for interferometric modulator array 0 2007
7,542,198 Device having a conductive light absorbing mask and method for fabricating same 19 2007
7,999,993 Reflective display device having viewable display on both sides 0 2007
7,729,036 Capacitive MEMS device with programmable offset voltage control 1 2007
7,556,917 Method for manufacturing an array of interferometric modulators 11 2007
7,773,286 Periodic dimple array 2 2007
7,715,079 MEMS devices requiring no mechanical support 3 2007
7,576,901 Method and device for selective adjustment of hysteresis window 1 2007
7,561,321 Process and structure for fabrication of MEMS device having isolated edge posts 17 2007
8,058,549 Photovoltaic devices with integrated color interferometric film stacks 1 2007
7,929,196 System and method of implementation of interferometric modulators for display mirrors 5 2008
7,847,999 Interferometric modulator display devices 1 2008
7,663,794 Methods and devices for inhibiting tilting of a movable element in a MEMS device 8 2008
7,515,327 Method and device for corner interferometric modulation 10 2008
7,623,752 System and method of testing humidity in a sealed MEMS device 4 2008
7,570,865 System and method of testing humidity in a sealed MEMS device 1 2008
8,105,496 Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer 1 2008
8,164,821 Microelectromechanical device with thermal expansion balancing layer or stiffening layer 0 2008
8,040,588 System and method of illuminating interferometric modulators using backlighting 0 2008
7,643,305 System and method of preventing damage to metal traces of flexible printed circuits 0 2008
7,859,739 Interferometric modulator array with integrated MEMS electrical switches 0 2008
7,977,931 Family of current/power-efficient high voltage linear regulator circuit architectures 0 2008
8,094,358 Dimming mirror 0 2008
7,612,933 Microelectromechanical device with spacing layer 16 2008
7,660,028 Apparatus and method of dual-mode display 8 2008
8,077,326 Human-readable, bi-state environmental sensors based on micro-mechanical membranes 0 2008
7,852,491 Human-readable, bi-state environmental sensors based on micro-mechanical membranes 3 2008
7,787,130 Human-readable, bi-state environmental sensors based on micro-mechanical membranes 5 2008
7,787,171 Human-readable, bi-state environmental sensors based on micro-mechanical membranes 2 2008
7,898,723 Microelectromechanical systems display element with photovoltaic structure 5 2008
7,969,638 Device having thin black mask and method of fabricating the same 0 2008
7,545,554 MEMS display 4 2008
7,583,429 Ornamental display device 2 2008
7,839,557 Method and device for multistate interferometric light modulation 5 2008
8,451,298 Multi-level stochastic dithering with noise mitigation via sequential template averaging 0 2008
8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 1 2008
7,860,668 Pressure measurement using a MEMS device 1 2008
8,023,167 Backlight displays 0 2008
7,768,690 Backlight displays 1 2008
7,746,539 Method for packing a display device and the device obtained thereof 1 2008
7,782,522 Encapsulation methods for interferometric modulator and MEMS devices 0 2008
7,855,826 Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices 6 2008
7,911,677 MEMS switch with set and latch electrodes 0 2008
8,115,988 System and method for micro-electromechanical operation of an interferometric modulator 0 2008
8,054,527 Adjustably transmissive MEMS-based devices 0 2008
7,852,483 Method and system for sensing light using an interferometric element having a coupled temperature sensor 2 2008
7,704,772 Method of manufacture for microelectromechanical devices 11 2008
7,859,740 Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control 0 2008
7,672,035 Separable modulator 15 2008
7,839,559 Controller and driver features for bi-stable display 0 2008
7,787,173 System and method for multi-level brightness in interferometric modulation 6 2008
7,791,787 Moveable micro-electromechanical device 0 2009
7,646,529 Method and device for multistate interferometric light modulation 1 2009
7,782,525 Area array modulation and lead reduction in interferometric modulators 2 2009
7,830,588 Method of making a light modulating display device and associated transistor circuitry and structures thereof 11 2009
7,944,604 Interferometric modulator in transmission mode 1 2009
8,204,703 Measurement and apparatus for electrical measurement of electrical drive parameters for a MEMS based display 0 2009
7,969,641 Device having power generating black mask and method of fabricating the same 0 2009
7,852,542 Current mode display driver circuit realization feature 0 2009
8,270,056 Display device with openings between sub-pixels and method of making same 0 2009
8,405,649 Low voltage driver scheme for interferometric modulators 0 2009
8,248,358 Altering frame rates in a MEMS display by selective line skipping 0 2009
7,864,403 Post-release adjustment of interferometric modulator reflectivity 0 2009
7,889,415 Device having a conductive light absorbing mask and method for fabricating same 4 2009
7,864,402 MEMS display 2 2009
8,102,590 Method of manufacturing MEMS devices providing air gap control 0 2009
8,081,370 Support structures for electromechanical systems and methods of fabricating the same 0 2009
7,952,787 Method of manufacturing MEMS devices providing air gap control 0 2009
8,243,014 Method and system for reducing power consumption in a display 0 2009
8,085,461 Systems and methods of actuating MEMS display elements 0 2009
8,207,920 System and method of sensing actuation and release voltages of an interferometric modulator 1 2009
7,990,604 Analog interferometric modulator 3 2009
8,368,124 Electromechanical devices having etch barrier layers 0 2009
7,944,601 Display device 1 2009
7,889,417 Electromechanical system having a dielectric movable membrane 2 2009
7,952,788 Method and device for selective adjustment of hysteresis window 0 2009
8,405,899 Photonic MEMS and structures 0 2009
8,094,363 Integrated imods and solar cells on a substrate 0 2009
8,358,266 Light turning device with prismatic light turning features 0 2009
8,270,062 Display device with at least one movable stop element 0 2009
8,068,269 Microelectromechanical device with spacing layer 0 2009
8,379,392 Light-based sealing and device packaging 0 2009
8,085,458 Diffusion barrier layer for MEMS devices 0 2009
8,081,372 Method and system for driving interferometric modulators 0 2009
7,935,555 Method and system for sealing a substrate 0 2009
7,920,319 Electromechanical device with optical function separated from mechanical and electrical function 0 2009
7,948,671 Apparatus and method for reducing slippage between structures in an interferometric modulator 1 2009
7,924,494 Apparatus and method for reducing slippage between structures in an interferometric modulator 0 2009
7,830,589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 0 2009
7,995,265 Interferometric modulators having charge persistence 0 2009
8,310,421 Display drive switch configuration 0 2010
8,144,385 Method and device for multistate interferometric light modulation 0 2010
8,098,416 Analog interferometric modulator device with electrostatic actuation and release 0 2010
8,340,615 Selectable capacitance circuit 0 2010
8,023,169 Apparatus and method of dual-mode display 0 2010
7,881,686 Selectable Capacitance Circuit 6 2010
7,835,093 Methods for forming layers within a MEMS device using liftoff processes 5 2010
8,218,229 Support structure for MEMS device and methods therefor 0 2010
8,149,497 Support structure for MEMS device and methods therefor 1 2010
7,852,544 Separable modulator 31 2010
7,952,789 MEMS devices with multi-component sacrificial layers 4 2010
8,284,475 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2010
8,298,847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 0 2010
7,978,395 Capacitive MEMS device with programmable offset voltage control 0 2010
8,330,770 System and method for improving the quality of halftone video using an adaptive threshold 0 2010
8,305,394 System and method for improving the quality of halftone video using a fixed threshold 0 2010
8,164,815 MEMS cavity-coating layers and methods 0 2010
7,929,197 System and method for a MEMS device 0 2010
8,390,916 System and method for false-color sensing and display 0 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,344,997 Method and system for writing data to electromechanical display elements 0 2010
8,040,338 Method of making passive circuits for de-multiplexing display inputs 1 2010
8,278,726 Controlling electromechanical behavior of structures within a microelectromechanical systems device 0 2010
8,081,373 Devices and methods for enhancing color shift of interferometric modulators 0 2010
8,035,884 Method and device for modulating light with semiconductor substrate 0 2010
8,264,763 Controller and driver features for bi-stable display 0 2010
8,358,458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 0 2010
8,213,075 Method and device for multistate interferometric light modulation 0 2010
8,223,424 Interferometric modulator array with integrated MEMS electrical switches 0 2010
8,009,347 MEMS display 0 2010
8,078,128 Selectable capacitance circuit 1 2010
8,035,883 Device having a conductive light absorbing mask and method for fabricating same 0 2011
8,441,412 Mode indicator for interferometric modulator displays 0 2011
8,098,417 Electromechanical system having a dielectric movable membrane 0 2011
8,294,184 EMS tunable transistor 0 2011
8,345,030 System and method for providing positive and negative voltages from a single inductor 0 2011
8,368,997 Electromechanical device with optical function separated from mechanical and electrical function 0 2011
8,358,459 Display 0 2011
8,289,613 Electromechanical device with optical function separated from mechanical and electrical function 0 2011
8,174,752 Interferometric modulator in transmission mode 0 2011
8,390,547 Conductive bus structure for interferometric modulator array 0 2011
8,299,774 Family of current/power-efficient high voltage linear regulator circuit architectures 0 2011
8,243,360 Device having a conductive light absorbing mask and method for fabricating same 0 2011
8,355,883 Measurement and apparatus for electrical measurement of electrical drive parameters for a MEMS based display 0 2012
8,437,071 Interferometric modulator array with integrated MEMS electrical switches 0 2012
 
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5,808,797 Method and apparatus for modulating a light beam 317 1996
5,982,553 Display device incorporating one-dimensional grating light-valve array 336 1997
6,088,102 Display apparatus including grating light-valve array and interferometric optical system 125 1997
6,271,808 Stereo head mounted display using a single display device 54 1998
6,130,770 Electron gun activated grating light valve 72 1998
6,101,036 Embossed diffraction grating alone and in combination with changeable image display 67 1998
6,215,579 Method and apparatus for modulating an incident light beam for forming a two-dimensional image 107 1998
6,956,878 Method and apparatus for reducing laser speckle using polarization averaging 24 2000
7,177,081 High contrast grating light valve type device 5 2001
6,764,875 Method of and apparatus for sealing an hermetic lid to a semiconductor die 24 2001
6,865,346 Fiber optic transceiver 4 2001
6,747,781 Method, apparatus, and diffuser for reducing laser speckle 59 2001
6,829,092 Blazed grating light valve 11 2001
6,707,591 Angled illumination for a single order light modulator based projection system 4 2001
6,800,238 Method for domain patterning in low coercive field ferroelectrics 1 2002
6,782,205 Method and apparatus for dynamic equalization in wavelength division multiplexing 60 2002
6,991,953 Microelectronic mechanical system and methods 9 2002
6,767,751 Integrated driver process flow 3 2002
6,728,023 Optical device arrays with optimized image resolution 18 2002
7,054,515 Diffractive light modulator-based dynamic equalizer with integrated spectral monitor 1 2002
6,822,797 Light modulator structure for producing high-contrast operation using zero-order light 5 2002
6,872,984 Method of sealing a hermetic lid to a semiconductor die at an angle 19 2002
6,829,258 Rapidly tunable external cavity laser 27 2002
6,908,201 Micro-support structures 2 2002
6,813,059 Reduced formation of asperities in contact micro-structures 65 2002
6,714,337 Method and device for modulating a light beam and having an improved gamma response 8 2002
7,057,795 Micro-structures with individually addressable ribbon pairs 1 2002
6,801,354 2-D diffraction grating for substantially eliminating polarization dependent losses 10 2002
6,956,995 Optical communication arrangement 2 2002
6,712,480 Controlled curvature of stressed micro-structures 6 2002
7,049,164 Microelectronic mechanical system and methods 51 2002
6,928,207 Apparatus for selectively blocking WDM channels 1 2002
7,057,819 High contrast tilting ribbon blazed grating 1 2002
6,987,600 Arbitrary phase profile for better equalization in dynamic gain equalizer 0 2002
6,934,070 Chirped optical MEM device 3 2002
6,927,891 Tilt-able grating plane for improved crosstalk in 1×N blaze switches 3 2002
7,068,372 MEMS interferometer-based reconfigurable optical add-and-drop multiplexor 4 2003
7,286,764 Reconfigurable modulator-based optical add-and-drop multiplexer 2 2003
6,947,613 Wavelength selective switch and equalizer 1 2003
6,922,272 Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices 5 2003
7,391,973 Two-stage gain equalizer 0 2003
7,027,202 Silicon substrate as a light modulator sacrificial layer 52 2003
6,922,273 PDL mitigation structure for diffractive MEMS and gratings 2 2003
6,829,077 Diffractive light modulator with dynamically rotatable diffraction plane 2 2003
6,806,997 Patterned diffractive light modulator ribbon for PDL reduction 1 2003
7,042,611 Pre-deflected bias ribbons 0 2003
 
SHARP KABUSHIKI KAISHA (21)
7,064,740 Backlit display with improved dynamic range 46 2001
7,164,284 Dynamic gamma for a liquid crystal display 5 2004
7,777,714 Liquid crystal display with adaptive width 2 2004
7,612,757 Liquid crystal display with modulated black point 1 2004
7,602,369 Liquid crystal display with colored backlight 1 2004
7,532,192 Liquid crystal display with filtered black point 15 2004
7,505,018 Liquid crystal display with reduced black level insertion 2 2004
7,573,457 Liquid crystal display backlight with scaling 20 2004
7,737,936 Liquid crystal display backlight with modulation 1 2004
7,675,500 Liquid crystal display backlight with variable amplitude LED 0 2004
7,714,830 Liquid crystal display backlight with level change 0 2004
7,623,105 Liquid crystal display with adaptive color 4 2004
7,898,519 Method for overdriving a backlit display 0 2005
8,050,511 High dynamic range images from low dynamic range images 1 2005
8,050,512 High dynamic range images from low dynamic range images 0 2005
7,525,528 Technique that preserves specular highlights 6 2005
7,342,592 System for reducing crosstalk 0 2006
8,121,401 Method for reducing enhancement of artifacts and noise in image color enhancement 0 2006
7,505,027 Backlit display with improved dynamic range 1 2007
7,505,028 Backlit display with improved dynamic range 1 2007
7,499,017 Backlit display with improved dynamic range 2 2007
 
VENTURE LENDING & LEASING IV, INC. (20)
6,356,378 Double substrate reflective spatial light modulator 239 2000
6,529,310 Deflectable spatial light modulator having superimposed hinge and deflectable element 68 2000
6,396,619 Deflectable spatial light modulator having stopping mechanisms 77 2000
6,538,800 Reflective spatial light modulator with deflectable elements formed on a light transmissive substrate 46 2002
6,690,502 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 4 2002
6,741,383 Deflectable micromirrors with stopping mechanisms 42 2002
7,099,065 Micromirrors with OFF-angle electrodes and stops 4 2003
6,798,561 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 8 2003
7,787,170 Micromirror array assembly with in-array pillars 4 2004
7,113,322 Micromirror having offset addressing electrode 4 2004
6,947,200 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 145 2004
7,158,279 Spatial light modulators with non-uniform pixels 1 2004
7,092,143 Micromirror array device and a method for making the same 4 2004
7,023,607 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 9 2004
7,012,733 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 2 2004
7,405,860 Spatial light modulators with light blocking/absorbing areas 2 2005
7,027,207 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 13 2005
7,009,754 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 75 2005
6,975,444 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 19 2005
7,295,363 Optical coating on light transmissive substrates of micromirror devices 0 2005
 
DOLBY LABORATORIES LICENSING CORPORATION (19)
7,370,979 Calibration of displays having spatially-variable backlight 8 2006
8,059,110 Motion-blur compensation in backlit displays 0 2006
7,413,307 High dynamic range display devices 0 2007
8,125,425 HDR displays with dual modulators having different resolutions 0 2007
7,800,822 HDR displays with individually-controllable color backlights 4 2007
7,777,945 HDR displays having light estimating controllers 1 2007
7,581,837 HDR displays and control systems therefor 0 2007
7,419,267 HDR displays with overlapping dual modulation 5 2007
7,377,652 HDR displays having location specific modulation 3 2007
7,413,309 High dynamic range display devices 11 2008
7,801,426 High dynamic range display devices having color light sources 1 2009
7,753,530 HDR displays and control systems therefor 1 2009
8,199,401 N-modulation displays and related methods 0 2009
7,942,531 Edge lit locally dimmed display 4 2010
8,172,401 Edge lit locally dimmed display 4 2011
8,446,351 Edge lit LED based locally dimmed display 0 2012
8,277,056 Locally dimmed display 0 2012
8,419,194 Locally dimmed display 0 2012
8,408,718 Locally dimmed display 0 2012
 
TEXAS INSTRUMENTS INCORPORATED (14)
5,148,157 Spatial light modulator with full complex light modulation capability 119 1990
5,192,395 Method of making a digital flexure beam accelerometer 194 1990
5,457,493 Digital micro-mirror based image simulation system 291 1993
5,526,688 Digital flexure beam accelerometer and method 198 1994
5,703,728 Support post architecture for micromechanical devices 35 1994
5,650,881 Support post architecture for micromechanical devices 251 1994
5,508,841 Spatial light modulator based phase contrast image projection system 79 1995
6,447,126 Support post architecture for micromechanical devices 317 1995
5,631,782 Support post architecture for micromechanical devices 75 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 380 1995
5,539,568 Method of exposing a light sensitive material 82 1995
5,808,780 Non-contacting micromechanical optical switch 222 1997
6,163,363 Photofinishing utilizing modulated light source array 25 1998
7,403,324 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 1 2006
 
QINETIQ LIMITED (7)
8,073,268 Method and apparatus for coded aperture imaging 0 2007
8,068,680 Processing methods for coded aperture imaging 0 2007
8,035,085 Coded aperture imaging system 0 2007
8,017,899 Coded aperture imaging using successive imaging of a reference object at different positions 3 2007
7,969,639 Optical modulator 0 2007
7,923,677 Coded aperture imager comprising a coded diffractive mask 1 2007
8,229,165 Processing method for coded aperture sensor 0 2007
 
SHARP LABORATORIES OF AMERICA, INC. (5)
8,395,577 Liquid crystal display with illumination control 0 2004
7,872,631 Liquid crystal display with temporal black point 6 2004
8,378,955 Liquid crystal display backlight with filtering 0 2004
7,853,094 Color enhancement technique using skin color detection 4 2006
8,400,396 Liquid crystal display with modulation for colored backlight 0 2009
 
THE UNIVERSITY OF BRITISH COLUMBIA (4)
6,891,672 High dynamic range display devices 80 2002
7,403,332 High dynamic range display devices 18 2003
7,106,505 High dynamic range display devices 33 2005
7,172,297 High dynamic range display devices 32 2006
 
3M INNOVATIVE PROPERTIES COMPANY (3)
6,647,164 Gimbaled micro-mirror positionable by thermal actuators 17 2000
6,711,318 Optical switch based on rotating vertical micro-mirror 6 2001
6,483,957 MEMS-based polarization mode dispersion compensator 19 2001
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (3)
7,230,749 Light blocking electrical interconnect 3 2005
7,242,482 Capacitance gap calibration 1 2005
7,466,475 Light blocking electrical interconnect 0 2007
 
LUCENT TECHNOLOGIES INC. (3)
5,636,052 Direct view display based on a micromechanical modulation 290 1994
6,876,484 Deformable segmented MEMS mirror 13 2003
7,321,454 Apparatus for modulating one or both of spectral phase and amplitude of an optical signal 0 2005
 
DAEWOO ELECTRONICS CO., LTD. (2)
5,663,830 Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof 5 1995
5,886,811 Thin film actuated mirror array in an optical projection system and method for manufacturing the same 31 1997
 
ROCKSTAR BIDCO, LP (2)
6,044,705 Micromachined members coupled for relative rotation by torsion bars 169 1997
6,467,345 Method of operating micromachined members coupled for relative rotation 26 2000
 
SEIKO EPSON CORPORATION (2)
6,381,381 Optical switching device and image display device 24 1999
6,438,282 Optical switching device and image display device 129 2001
 
ASML NETHERLANDS B.V. (1)
7,355,677 System and method for an improved illumination system in a lithographic apparatus 0 2004
 
FUJI PHOTO FILM CO., LTD. (1)
5,953,103 Color printer 24 1997
 
HEWLETT-PACKARD COMPANY (1)
6,262,829 Method of digital grayscale control using modulation of a slow-acting light source 2 1999
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
5,818,563 Substrate structure and assembly method for reduced spatial light modulator size 3 1997
 
IRIDIGM DISPLAY CORPORATION (1)
7,256,922 Interferometric modulators with thin film transistors 27 2004
 
Labor Dr. Hans Steinbichler (1)
5,408,355 Micromechanical transducer 20 1992
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (1)
7,451,596 Multiple degree of freedom micro electro-mechanical system positioner and actuator 5 2005
 
NATIONAL SEMICONDUCTOR CORPORATION (1)
6,816,224 Single metal pixel array for light valve utilizing lateral sublithographic spacer isolation 0 2001
 
Nippondenso Co., Ltd. (1)
5,635,708 Optical scanning apparatus having a fixed compound reflective assembly for two-dimensional scan capability and method thereof 3 1995
 
NORTEL NETWORKS LIMITED (1)
6,426,013 Method for fabricating micromachined members coupled for relative rotation 22 1999
 
Northrop Corporation (1)
5,170,283 Silicon spatial light modulator 153 1991
 
QIMONDA AG (1)
6,420,099 Tungsten hard mask for dry etching aluminum-containing layers 4 1999
 
Qualcomm Mems Technologies Co., Ltd. (1)
7,172,915 Optical-interference type display panel and method for making the same 69 2004
 
SAMSUNG DISPLAY CO., LTD. (1)
5,940,059 Thin-film transistor liquid crystal display devices having high resolution 8 1997
 
SANDIA CORPORATION (1)
5,870,176 Maskless lithography 112 1997
 
SILICON QUEST KABUSHIKI-KAISHA (1)
7,782,524 System configurations and methods for controlling image projection apparatuses 1 2008
 
SOLAE, LLC (1)
7,556,836 High protein snack product 0 2004
 
THE UNIVERSITY OF SYDNEY (1)
7,018,745 Controlled phase delay between beams for writing bragg gratings 4 2003
 
TRUSTEES OF BOSTON UNIVERSITY (1)
6,529,311 MEMS-based spatial-light modulator with integrated electronics 8 2000
 
UDC, LLC (1)
7,499,208 Current mode display driver circuit realization feature 5 2005
 
UNIVERSITY OF LOUISVILLE RESEARCH FOUNDATION, INC. (1)
5,276,636 Method and apparatus for adaptive real-time optical correlation using phase-only spatial light modulators and interferometric detection 18 1992
 
Other [Check patent profile for assignment information] (2)
6,489,984 Pixel cross talk suppression in digital microprinters 21 2000
6,989,603 nF-Opening Aiv Structures 4 2002