Method and composition for polishing metal surfaces

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United States of America Patent

SERIAL NO

07387474

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention relates to a method of polishing a metal surface using an aqueous polishing composition for metal surfaces comprising water, an abrasive agent, such as sluminum oxide, cerium oxide, zirconium oxide, tin oxide, silicon dioxide, silicon carbide, titanium dioxide and titanium carbide and a salt, or combination of salts, such as aluminum chloride, zirconyl nitrate, zirconyl sulfate, cerium nitrate, aluminum nitrate, aluminum bromide, aluminum iodide, aluminum chloride, zirconyl chloride, tin chloride, aluminum perchlorate, magnesium chloride, zinc chloride, magnesium perchlorate and iron chloride.

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Patent Owner(s)

  • ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC.;RODEL, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Roberts, John V H Newark, DE 44 2429

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