Vacuum gauge of thermo-conductive type with quartz oscillator
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United States of America Patent
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-
Oct 2, 1990
Grant Date -
N/A
app pub date -
Feb 15, 1989
filing date -
Feb 18, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A pressure or vacuum gauge measures pressure of gas within a chamber. A quartz oscillator is disposed within the chamber for undergoing oscillation having a frequency dependent on a body temperature thereof. A constant heat source is disposed in spaced relation to or directly on the temperature-dependent quartz oscillator for heating the same to hold the body temperature thereof which is dependent on the pressure of surrounding gas. The oscillating frequency of the quartz oscillator is converted into a signal indicative of the pressure of the gas.
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