Device for cleaning in particular of disc-shaped oxide substrates

United States of America Patent

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Oct 2, 1990
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N/A
app pub date
Sep 27, 1988
filing date
Oct 5, 1987

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Expired

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Abstract

A method and a device for cleaning in particular of oxide substrates is proposed, the substrates being extracted from a quantity of extremely pure water after pre-cleaning. The temperature of the substrate and the extraction velocity from the water are so selected that a water film extending from the water surface runs off evenly.

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Patent Owner(s)

Patent Owner	Address
NUKEM GMBH A CORP OF FED REP OF GERMANY	RODENBACHER CHAUSSEE 6 D-6450 HANAU 11

International Classification(s)

B08B:CLEANING IN GENERAL; PREVENTION OF FOULING IN GENE....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Lenck, Norbert	Rodenbach, DE	1	8
Worner, Jorg	Grosskrotzenburg, DE	20	135

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Device for cleaning in particular of disc-shaped oxide substrates

Number of patents in Portfolio can not be more than 2000

United States of America Patent

07249986

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PATENT NO	4960141
SERIAL NO	07249986
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07249986

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