Method of monitoring semiconductor manufacturing processes and test sample therefor

United States of America Patent

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Oct 16, 1990
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N/A
app pub date
Feb 2, 1988
filing date
Feb 2, 1988

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Expired

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Abstract

Method of determining contaminants in a semiconductor processing apparatus in which a high purity, high carrier lifetime semiconductor test wafer is processed and the degradation of its carrier lifetime is determined.

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Patent Owner(s)

Patent Owner	Address
SERA SOLAR CORPORATION SANTA CLARA CA A CORP OF CA	Not Provided

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Christel, Lee A	Menlo Park, CA	37	4807
Cogan, George W	Menlo Park, CA	4	53
Gibbons, James F	Palo Alto, CA	37	1371
Miner, Gary E	Mountain View, CA	14	505

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Method of monitoring semiconductor manufacturing processes and test sample therefor

Number of patents in Portfolio can not be more than 2000

United States of America Patent

07151436

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PATENT NO	4963500
SERIAL NO	07151436
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07151436

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