Microengineered diaphragm pressure switch
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United States of America Patent
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-
Oct 23, 1990
Grant Date -
N/A
app pub date -
Mar 16, 1989
filing date -
Mar 17, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A microengineered pressure actuated switch includes a domed diaphragm having a snap-action response between defined states (d.sub.1, d.sub.5) of the diaphragm. This response is to an applied pressure differential across the diaphragm. The diaphragm is supported on a substrate of semiconductor material. In a method of making such a switch, a layer of inorganic material is provided on one side of a substrate of semiconductor material. Semiconductor material is removed from the substrate such that a defined region of the layer is not in contact with the semiconductor material, this defined region forming the diaphragm. The layer of inorganic material is so stressed that after semiconductor material is removed, the layer assumes a domed configuration and incorporates a pre-bias in the direction of doming.
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