Method for the scanning confocal light-optical microscopic and indepth examination of an extended field and devices for implementing said method
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United States of America Patent
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Oct 23, 1990
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N/A
app pub date -
Feb 26, 1989
filing date -
Jan 27, 1988
priority date (Note) -
Expired
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Abstract
Method for the scanning confocal light-optical microscopic and in-depth examination of an extended field and devices for implementing said method. The method consists of forming a principal luminous beam made up of a plurality of secondary luminous beams distinguished from each other by means of at least one of their characteristics, directing the principal luminous beam towards focussing means (30), focussing onto an object to be examined by means of the focussing means (30) at points of different altitude the various secondary luminous beams, sending back the secondary luminous beams reflected by the object to be examined towards a detection system (20), detecting the intensity of the secondary beams, digitally analyzing and processing the signals detected, and of carrying out a scanning of the principal luminous beam as regards all of the object to be studied. Application for microelectronics inspection.
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