Automated diagnostic system
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United States of America Patent
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-
Oct 30, 1990
Grant Date -
N/A
app pub date -
Oct 11, 1988
filing date -
Oct 11, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Artificial intelligence diagnostic expert system software is used to interrogate and monitor etcher machine state by directly accessing vital hardware/process sensors. Sensor values and `recipe` variables are analyzed to determine cause of failures and recommend repair strategies, realtime monitoring and analysis of these values allows the expert system to predict failures prior to occurrence and show cause of impending failure.
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