
US Patent No: 4,972,092
Number of patents in Portfolio can not be more than 2000
Apparatus for determining the effective surface roughness of polished optical samples by measuring the integral scattered radiation
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Nov 20, 1990
Issued date -
Sep 15, 1989
filing date -
07/408,532
serial no -
Expired
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Abstract
Apparatus for determining the effective surface roughness of polished optical samples, by measuring the total integrated scattering, only operates for non-light-transmissive samples. For a transmissive sample, the invention adds a light trap behind the sample for transmitted light, and a diaphragm in front of the sample. The rear surface of the diaphragm is provided with a non-reflective wafing which traps secondary light reflected or scattered by the inside rear surface of the sample.
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First Claim
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
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| 4,703,187 Method and apparatus for the determination of the thickness of transparent layers of lacquer | 10 | 1986 | |