Apparatus for determining the effective surface roughness of polished optical samples by measuring the integral scattered radiation

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United States of America Patent

PATENT NO 4972092
SERIAL NO

07408532

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Apparatus for determining the effective surface roughness of polished optical samples, by measuring the total integrated scattering, only operates for non-light-transmissive samples. For a transmissive sample, the invention adds a light trap behind the sample for transmitted light, and a diaphragm in front of the sample. The rear surface of the diaphragm is provided with a non-reflective wafing which traps secondary light reflected or scattered by the inside rear surface of the sample.

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Patent Owner(s)

  • DEUTSCHE FORSCHUNGSANSTALT FUR LUFT-UND RAUMFAHRT E.V.;DEUTSCHE FORSCHUNGSANSTALT FUR LUFT- UND RAUMFAHRT, LINDER HOHE, D-5000 KOLN 90, FED. REP. OF GERMANY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Rosteck, Helmut T A Wolfenbuttel, DE 1 10
Schmitt, Dirk-Roger Braunschweig, DE 3 21

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