Method of cleaning wafers or the like
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United States of America Patent
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-
Nov 27, 1990
Grant Date -
N/A
app pub date -
Feb 9, 1989
filing date -
Mar 5, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Liquid carbon dioxide substantially free of particles is prepared by evaporating liquid carbon dioxide, passing the resulting gaseous carbon dioxide through a suitable filter to remove particles therefrom and cooling the particle-free gas to reliquefy it.
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