Monolithic resonator for a vibrating beam accelerometer
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United States of America Patent
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Dec 25, 1990
Grant Date -
N/A
app pub date -
Dec 21, 1989
filing date -
Dec 21, 1989
priority date (Note) -
Expired
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Abstract
A monolithic resonator for a vibrating beam accelerometer is provided which comprises an outer structure including a mounting structure, a proof mass structure, a plurality of flexure beams extending between the mounting and proof mass structures; and an inner structure including first and second isolator masses, first and second isolator beams connected to one portion of the isolator masses, respectively, and a vibrating beam extending between other portions of the isolator masses. The monolithic resonator is non-planar in that the outer structure has a thickness greater than said inner structure.
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