Plasma generators
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United States of America Patent
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-
Dec 25, 1990
Grant Date -
N/A
app pub date -
Aug 15, 1988
filing date -
Aug 13, 1987
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A plasma generator utilizing two magnetrons preferably acting out of phase with each other and each comprising one part of the other magnetic mirror. There may be included a thermal fragmenter to produce gas atoms directly into the plasma for ionization before being drawn onto a substrate. The use of a thermal fragmenter separate from the magnetrons produces ionized atoms directly where they are needed and allows quicker changeover to alternative atoms for multilayer coating.
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