Internally pressurized bellows pump

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United States of America Patent

PATENT NO 4981418
SERIAL NO

07385855

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Abstract

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A bellows-type pump has a plastic bellows interiorly supported by interior pressure. The interior pressure is supplied by a fluid source which passes through a pressure regulator to control the amount of interior pressure exerted on the bellows. A fiber-optic leak detector can be inserted into the plastic bellows to detect the leakage of process fluid therein.

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Patent Owner(s)

Patent OwnerAddress
ENTEGRIS INC129 CONCORD ROAD BILLERICA MA 01821

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chan, Anthony K Alhambra, CA 13 215
Kingsford, Kenji A Devore, CA 28 721

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