Semiconductor element

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United States of America Patent

PATENT NO 4982251
SERIAL NO

07511952

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Abstract

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A semiconductor element comprises its main part constituted of a polycrystalline silicon semiconductor layer containing 0.01 to 1 atomic % of fluorine atoms.

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHAJAPAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hirai, Yutaka Tokyo, JP 83 1872
Komatsu, Toshiyuki Yokohama, JP 91 1261
Nakagawa, Katsumi Tokyo, JP 165 12872
Nakagiri, Takashi Tokyo, JP 52 5098
Omata, Satoshi Tokyo, JP 15 409
Osada, Yoshiyuki Yokosuka, JP 46 1245

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