Automatic coating system

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United States of America Patent

PATENT NO 4982694
SERIAL NO

07307060

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Abstract

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An automatic coating system includes a coating apparatus for coating a coating material on an object to be coated in accordance with a coating operation including a plurality of steps, a memory for storing operation programs of a series of steps, a step updating key for inputting a signal for operating the series of steps of the coating apparatus one by one, and a CPU for starting one step of the coating apparatus on the basis of the program when the signal is input. After the one step of the coating apparatus is finished, the next step is not started until the step updating key is operated.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITEDTOKYO 107-6325

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Moriyama, Masashi Tokorozawa, JP 21 114

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