Wafer etching, cleaning and stripping apparatus
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United States of America Patent
Stats
-
Jan 8, 1991
Issued Date -
N/A
app pub date -
Oct 6, 1988
filing date -
Jul 26, 1983
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A wafer stripping, cleaning and etching apparatus includes a bowl, a table in the bowl carrying cassette of wafers, and a spray post with multiple fluid passages and ports directing fluid spray against the wafers.
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International Classification(s)
Cited Art Landscape
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