Importance

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Abstract

A self enclosed filter pump system (10) is provided to deliver precise quantities of selected fluids. The system (10) includes a pump assembly (12) of a pneumatically controlled type and a modular filter and fluid bag assembly (14) adapted to mate with the pump assembly (12) during use. The filter and fluid bag assembly (14) is a flexible component which includes a container portion (20) for storing enclosed fluid (16) and an extension portion (22) for mating with the pump assembly (12). A series of fluid flow passages (35) create a fluid flow path from the storage chamber (34) to a first value bubble (36), a pump/filter bubble (46), a second valve bubble (52) and an outlet port (56). A filter membrane (48) may be secured within the pump/filter bubble (46) to filter the fluid (16) to remove particulate matter. The various bubbles (36, 46 and 52) are occluded and opened by pneumatic pressure applied to matching chambers (78, 88 and 94) in the pump housing (62). The filter and fluid bag assemblies (14) are adapted to isolate the fluid (16) from the pump assembly (12), to be constructed to have a variety of storage chamber (34) capacities, to contain any of a wide variety of selected fluids (12) and to be modularly interchangeable such that a wide variety may properly operate with a single pump assembly (12). The primary expected usages of the pump system (10) are in the semiconductor manufacturing, chemical mixing, biomedical and food processing fields.

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First Claim