Importance

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Abstract

A semiconductor probe card with electrically separate driven guards for each probe. The probe card has electrically separate fingers surrounding each signal point contact which act as driven guards for reducing leakage problems and stray capacitance on the card. Microstrip ceramic blade probes are attached to the card at each finger. The microstrip ceramic blade probes have a conducting trace on one side which provides connection between the circuit being tested and the testing equipment. The other side and the mounting surface of the probe have ground planes which act as driven guards to further reduce leakage and stray capacitance. When connected to the testing equipment, the testing equipment drives the fingers and the ground planes on the probe to the same potential as the signal from the circuit.

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First Claim