Method for synthesis or diamond
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United States of America Patent
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Jan 15, 1991
Grant Date -
N/A
app pub date -
Apr 21, 1988
filing date -
Apr 22, 1987
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The following are disclosed: A method for synthesis of diamond which is characterized by contacting a gas obtained by excitation of carbon monoxide and hydrogen in such a ratio as carbon monoxide being at least 1 mol % per total of carbon monoxide and hydrogen with a substrate in the presence of a reducing metal. A method for synthesis of diamond which is characterized by contacting with a substrate a gas obtained by excitation of carbon dioxide and hydrogen mixed at such a ratio of carbon dioxide being 0.1-20 mol % per hydrogen. A method for synthesis of diamond by depositiong diamond on the surface of a substrate by introducing onto the surface of the substrate a plasma obtained from hydrogen and carbon source gas by irradiation of microwave in a plasma generator which is characterized in that progress of microwave oscillated from one microwave oscillator is divided and thus divided respective microwaves and led to a plurality of plasma generators. A diamond synthesis apparatus which is characterized by comprising a microwave oscillator for oscillation of microwave, a branched waveguide for dividing the microwave oscillated from said microwave oscillator and a plurality of plasma generators which are connected with said branched waveguide and have a substrate for deposition of diamond, respectively.
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