Rotary wafer drier
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 29, 1991
Grant Date -
N/A
app pub date -
Sep 27, 1989
filing date -
Sep 27, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A rotary wafer drying apparatus comprises a rotatable rotor for applying centrifugal force to the wafers, and a motor for rotating the rotor. A pair of cradles, attached to the rotor, receive a plurality of wafers arranged vertically. When the wafers are to be dried, the cradles are rotated by about 90.degree. from the state of reception, with the wafers maintained approximately at the horizontal state. When wafers of different diameters are to be dried and the size of the cradles should be changed correspondingly, not the rotor itself but only the pair of cradles in the rotor are changed.
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