Importance

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Abstract

In a gas mixing apparatus for the generation of a continuous stream of a gas mixture a carrier gas line is in communication with a collector to which a carrier gas supply line and component gas supply lines are connected of which each includes a mass flow regulator and a three-way valve with an output in communication with the collector and a first inlet connected to the respective mass flow regulator and a second input in communication with the carrier gas supply line. The second inputs to the three-way valves are always open so that carrier gas is always permitted to flow through the valves for rapid response to flow changes through the valves first inlet.

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First Claim