High frequency discharge apparatus with hollow waveguide input section
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United States of America Patent
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Feb 5, 1991
Grant Date -
N/A
app pub date -
Apr 21, 1989
filing date -
Apr 21, 1989
priority date (Note) -
Expired
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Abstract
A high-power, high-frequency discharge apparatus is disclosed. An electrical wave is guided toward the discharge region by a hollow waveguide that is coupled to a discharge electrode via a waveguide transition element. The waveguide transition element can be formed of various shapes. Obstacles placed in the waveguide provide impedance matching and minimize power reflected back toward the source. The obstacles may be movable to optimize impedance matching.
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