Three dimensional object surface determination with automatic sensor control

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United States of America Patent

PATENT NO 4991968
SERIAL NO

07221641

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Abstract

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A system for object surface determination in which the projector/detector sensor of the system is controlled by a control detector which is responsive to a plurality of different parts of a portion of the reflected radiation being sensed by the projector/detector sensor.

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Patent Owner(s)

Patent OwnerAddress
RUDOLPH TECHNOLOGIES INCONE RUDOLPH ROAD FLANDERS NJ 07836

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Stern, Howard K Greenlawn, NY 21 642
Yonescu, William E Dix Hills, NY 12 323

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