Flexible tester surface for testing integrated circuits
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United States of America Patent
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Feb 19, 1991
Issued Date -
N/A
app pub date -
Nov 14, 1989
filing date -
May 16, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The individual transistor or logic unit testing is accomplished by a specially fabricated flexible tester surface made in one embodiment of several layers of flexible silcon dioxide, each layer containing vias and conductive traces leading to thousands of microscopic metal probe points on one side of the test surface. The probe points electrically contact the contacts on the wafer under test by fluid pressure. The tester surface traces are then connected, by means of multiplexers, to a conventional tester signal processor.
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