Method and apparatus for evaluating defects of an object

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United States of America Patent

PATENT NO 4999785
SERIAL NO

07296481

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Abstract

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Apparatus and method for evaluating the defects in an object wherein data related to the object is processed to develop an indication for each defect in a first group of defects and to further develop a composite indication for the defects in the remaining composite group of defects and wherein, depending upon the level of the composite indication, the data is further processed with respect to the composite group of defects.

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Patent Owner(s)

Patent OwnerAddress
RUDOLPH TECHNOLOGIES INCONE RUDOLPH ROAD FLANDERS NJ 07836

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Schmuter, Samson L New York, NY 2 86

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