Solid state pressure sensor
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United States of America Patent
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-
Mar 26, 1991
Grant Date -
N/A
app pub date -
Jan 2, 1990
filing date -
Jan 2, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A solid state pressure sensor that includes a silicon body having a circumferentially continuous annular periphery and an imperforate central diaphragm bridging the periphery in an integral monolithic construction that is circumferentially symmetrical about the axis of the periphery. Strain gauge sensors are deposited on the body so as to form an integral assembly with the body, and are constructed and arranged to provide electrical signals as a function of flexure of the central diaphragm with respect to the periphery of the body. A pair of fittings are bonded to the body periphery on opposite sides of the diaphragm. Each fitting forms a hermetically sealed fluid cavity on an associated side of the diaphragm, with each such cavity being circumferentially symmetrical with respect to the central axis of the sensor.
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