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Abstract

Mid and deep ultraviolet light transmitting pellicles for protecting photomasks from particle contamination during a projection printing process. The pellicles are manufactured from polyglycidyl-methacrylate-ethacrylate copolymer, from polyvinyl butyral polymer or from nitrocellulose. The polyvinyl butyral pellicle is sandwiched between two layers of an antireflective coating of poly-1H, 1H Pentadecafluorooctyl methacrylate or poly-1H, 1H Pentadecafluorooctyl acrylate. The nitrocellulose pellicle includes two double layers of antireflective material with the first double layer positioned on one side of the nitrocellulose layer and comprising a layer of the thermoplastic phenolic resin novalac and a layer of either poly-1H, 1H Pentadecafluorooctyl methacrylate or poly-1H, 1H Pentadecafluorooctyl acrylate. The second double layer is positioned on the other side of the nitrocellulose layer and comprises a layer of novolac and a layer of either poly-1H, 1H Pentadecafluorooctyl methacrylate or poly-1H, 1H Pentadecafluorooctyle acrylate.

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First Claim