Fluid flow control
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United States of America Patent
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-
Apr 23, 1991
Grant Date -
N/A
app pub date -
Nov 15, 1988
filing date -
Nov 15, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Disclosed is a variable fluid flow controller for regulating the rate of flow from a source of fluid under pressure, comprising a plurality of unique flow restriction passagways, a valve associated with each passageway, and a rotatable cam for selectively opening any one of the valves while maintaining the remaining valves closed. The flow restriction passageway preferably comprises a channel etched on the surface of a first silicon wafer and enclosed by a second wafer to form a fluid flow passageway, one of the first or second wafers having a plurality of apertures therethrough for intersecting the passageway at various distances along its length.
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