Ball screw supported Z stage

United States of America Patent

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Apr 23, 1991
Grant Date
N/A
app pub date
Jun 14, 1989
filing date
Jun 14, 1989

priority date (Note)
Expired

status (Latency Note)

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Abstract

A ball screw supported Z stage for use in a wafer prober is disclosed. The present invention provides the capability of precisely positioning and rigidly supporting a work surface in a low profile package.

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Patent Owner(s)

Patent Owner	Address
MARTEK INC	112 SOUTH ROCKFORD DRIVE SUITE 103 TEMPE AS 85281

International Classification(s)

G01R:MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC V....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Lindsay, William B	Mountain View, CA	1	7

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Ball screw supported Z stage

Number of patents in Portfolio can not be more than 2000

United States of America Patent

07365878

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PATENT NO	5010295
SERIAL NO	07365878
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07365878

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