Wafer prober
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Apr 23, 1991
Grant Date -
N/A
app pub date -
Mar 12, 1990
filing date -
Dec 13, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A wafer prober includes a supporting device for supporting a wafer on which a plurality of electrode pads are disposed, a plurality of probes for contacting respective electrode pads, a spraying device for spraying a gas onto the electrode pads contacted by the plurality of probes, and an aspirating device for aspirating waste generated by the contact of the probes with the electrode pads and carried by the gas.
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