Method and apparatus for fine movement of specimen stage of electron microscope
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United States of America Patent
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Apr 30, 1991
Grant Date -
N/A
app pub date -
Dec 26, 1989
filing date -
Dec 27, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Method and apparatus for fine movement of a specimen stage of an electron microscope wherein a value of enlargement magnification M of the electron microscope is set, a manipulation unit adapted to move an image enlarged by the electron microscope in X or Y direction is then manipulated; a pulse signal PX2 or PY2 which accords with a manipulation amount of the manipulation unit is delivered, the specimen stage is moved in the X or Y direction in accordance with the delivered pulse signal, a pulse signal PX1 and PY1 which accords with a moving distance of the specimen stage in the X or Y direction is delivered, and the operation of movement of the specimen stage is stopped when the relation represented by PX2.multidot.K/M=PX1 or the relation represented by PY2.multidot.K/M=PY1 stands, where K is a constant.
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