There is disclosed a system in which, according to the time domain method, a laser light is irradiated to an object to be measured, photon pulses based on the scattering light from the object to be measured are received, time series data are generated based on the light receiving signal, and based on the time series data thus generated, the particle size distribution of particles in the object to be measured is measured. Thus, the present invention achieves a considerable reduction in time required for finally obtaining the particle size based on the measured data, as compared with a conventional system using a calculator program.
* 5,316,983 Apparatus for analysis of particulate material, analytical method for same, apparatus for production of ultrapure water, apparatus for manufacturing of semiconductor, and apparatus for production of pure gas
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