Method of patterning resist

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United States of America Patent

PATENT NO 5015553
SERIAL NO

07489789

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A CAD driven photoplotter selectively exposes a photographic imaging layer without affecting the underlying UV sensitive resist on a substrate to make a printed wiring board, for example. The image layer is developed on the board and used as an in situ mask for the underlying UV resist during exposure to UV. After UV exposure, the image layer is peeled off to allow conventional processing of the resist. The in situ mask is preferably applied in the form of a baseless, high contrast, high gamma emulsion layer bonded to the protective cover sheet over the uncured resist. To facilitate application, the emulsion layer is carried by a release paper which is removed before photoplotting. After UV exposure, the cover sheet and emulsion layer are integrally peeled from the resist.

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Patent Owner(s)

Patent OwnerAddress
THE FOXBORO COMPANYFOXBORO MA 02035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Grandmont, Paul E Franklin, MA 12 354
Lake, Harold Sharon, MA 17 937

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