Laser link blowing in integrateed circuit fabrication
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United States of America Patent
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-
Jun 4, 1991
Grant Date -
N/A
app pub date -
Dec 29, 1989
filing date -
Dec 29, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A single beam of radiation is split and part of the beam is directed to conductive links, e.g. runners on a substrate. Analysis of the incident beam and the beam reflected from the substrate permits a determination of when the link is blown and rendered non-conductive and when significant substrate involvement occurs.
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