Electrostatically deformable single crystal dielectrically coated mirror
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United States of America Patent
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Jun 11, 1991
Grant Date -
N/A
app pub date -
Sep 7, 1989
filing date -
Sep 7, 1989
priority date (Note) -
Expired
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Abstract
An electrostatically deformable single crystal mirror comprising a highly conducting thick substrate layer and a highly conducting thin membrane layer separated from the thick layer by an insulator is disclosed. The center of the insulating layer is etched to form a cavity. The outer surface of the membrane layer is polished and coated with a dielectric to form a mirror. A voltage is applied between the membrane and the substrate to cause the membrane to deform. Various embodiments of the invention provide for planar translation of the mirror and for convex/concave deformation of the mirror. Incorporation of a deformation sensor in the deformable mirror allows for deformation measurement. In a particular embodiment of the invention, the deformable mirror is used in a tunable etalon for use in an optical filter.
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