Apparatus for pre-aligning substrate preparatory to fine alignment
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United States of America Patent
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Jun 25, 1991
Grant Date -
N/A
app pub date -
Oct 1, 1984
filing date -
May 29, 1984
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A pre-alignment system for use in an apparatus including a fine alignment system. The pre-alignment system includes two optical imaging systems for imaging two alignment marks provided on a substrate for the purpose of fine alignment onto two radiation-sensitive detectors. The outputs signals of the detectors are indicative of the pre-alignments of a associated substrate mark relative to the associated detection systems.
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