Method and apparatus for three dimensional object surface determination using co-planar data from multiple sensors

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United States of America Patent

PATENT NO 5028799
SERIAL NO

07445121

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Abstract

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A practice for developing data for use in the three-dimensional location of the points on an object surface wherein first and second sensor means are used to cause first and second electromagnetic radiation to be directed at the object surface at first and second directions which are in a common plane.

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Patent Owner(s)

Patent OwnerAddress
RUDOLPH TECHNOLOGIES INCONE RUDOLPH ROAD FLANDERS NJ 07836

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Sullivan Centerport, NY 2 149
Stern, Howard K Greenlawn, NY 21 642
Yonescu, William E Dix Hills, NY 12 323

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