Device for working a workpiece using laser light

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United States of America Patent

PATENT NO 5029243
SERIAL NO

07407379

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A device for working a workpiece by means of laser light includes a laser, a beamsplitter for splitting the laserbeam into at least two sub-laserbeams of substantially identical intensities, and a control unit which controls the light intensity of the laser and the movement of a workpiece support and the laserbeam relative to each other. The beamsplitter includes at least one digital-phase grating which divides the laserbeam into a plurality of sub-laserbeams to produce a pattern of laser spots onto the workpiece.

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Patent Owner(s)

Patent OwnerAddress
U S PHILIPS CORPORATION100 EAST 42ND STREET NEW YORK NY 10017

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dammann, Hans Tangstedt, DE 10 309
Patt, Paul J Mt. Kisco, NY 22 423
Rabe, Gert Pinneberg, DE 8 184
Schildbach, Klaus B Waalre, NL 5 74
Velzel, Christian H F Eindhoven, NL 1 28

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