Importance

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Abstract

A differential pressure transducer has a first pressure chamber, defined by a first chip having a reduced-thickness first pressure-sensitive diaphragm on one side of that pressure chamber, and a second chip having a reduced-thickness second pressure-sensitive diaphragm on another side of that pressure chamber. A first pressure port communicates with that first diaphragm on a side opposite the first pressure chamber and a second pressure port is coupled to the first pressure chamber. A second pressure chamber is on a side of the second diaphragm opposite the first pressure chamber. Sensors are at the first diaphragm for measuring differential pressure between said first and second ports and at the second diaphragm for measuring differential pressure between said first and second pressure chambers. An aperture may extend through one of the chips in a region spaced from its pressure-sensitive diaphragm, which may therethrough be coupled to the second pressure port. That feature may also be part of a subcombination in which one of the chips or diaphragms is omitted.

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First Claim