Processing liquid supply unit
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United States of America Patent
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-
Jul 30, 1991
Issued Date -
N/A
app pub date -
Sep 5, 1990
filing date -
Jun 3, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A processing liquid supply unit comprises a storage tank for storing a processing liquid, a sensor for sensing the amount of processing liquid stored in the storage tank, a refilling mechanism for automatically refilling the processing liquid into the storage tank when the sensor senses that the amount of processing liquid in the storage tank drops below the specified value and a processing liquid delivery mechanism for delivering the processing liquid from the storage tank to an object being processed.
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