Seal assembly for a wafer grinding machine
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United States of America Patent
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-
Aug 6, 1991
Grant Date -
N/A
app pub date -
Apr 25, 1989
filing date -
Apr 25, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A seal assembly is mounted within a grinding machine to separate a grinding wheel from the main portions of a wafer being ground. The seal assembly has a pair of free edges which are disposed to define a V-shaped gap through which the peripheral edge of the wafer passes into grinding relation with the grinding wheel. A perforated hollow tube is also mounted behind the free edges of the strips to blow air onto and across the planar surface of the wafer being ground to prevent accumulation of debris thereon.
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