Pump assembly for obtaining a high vacuum
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United States of America Patent
Stats
-
Aug 13, 1991
Grant Date -
N/A
app pub date -
Aug 14, 1990
filing date -
Dec 16, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A pumping assembly for obtaining a high vacuum, the assembly comprising a primary pump (4) and a secondary pump (1) associated in series, the inlet of the secondary pump (1) being taken from an enclosure (3) to be evacuated, the assembly further including means (7) for starting the secondary pump (1) when the pressure upstream from the primary pump (4) drops below a value P.sub.1, the assembly being characterized in that a passive tank (10) followed by an isolating valve (11) are interposed between the outlet (12) from the secondary pump (1) and the inlet (13) to the primary pump (4), and in that it includes control means (7) for closing the isolating valve (11) and stopping the primary pump (4) when the pressure in said passive tank (10) reaches a value P.sub.2
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