High energy ultraviolet laser reflector grown on a single crystalline substrate
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United States of America Patent
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Aug 27, 1991
Grant Date -
N/A
app pub date -
Oct 30, 1989
filing date -
Apr 19, 1989
priority date (Note) -
Expired
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Abstract
Optical reflectors and methods of constructing optical reflectors having high damage thresholds, durability and general applicability are disclosed in which a highly planar substrate, such as a single crystal silicon or other single crystalline material, is disposed within a deposition chamber and oriented to present a particular crystallographic plane. An epitaxial layer of reflective metal, such as aluminum, is grown upon the substrate by ion beam or other method of deposition and then covered with a transparent protective coating.
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