Method for controlling the sensitivity and linearity of capacitive transducer systems
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United States of America Patent
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Sep 17, 1991
Issued Date -
N/A
app pub date -
Jan 26, 1990
filing date -
Jan 30, 1989
priority date (Note) -
Expired
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Abstract
Inherent capacitive-type nonlinearities in a capacitive displacement transducer can be eliminated or reduced by the introduction of an oppositely-sensed nonlinearity. The oppositely sensed nonlinearity is introduced by selecting a diaphragm thickness to define a stiffness such that there is an increased resistance to deflection. The increased resistance to deflection generates a nonlinearity which decreases with increasing input to offset an oppositely sensed inherent nonlinearly which increases with increasing input, thereby balancing the nonlinearities and achieving an overall linear output.
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