Mobile injector system
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United States of America Patent
Stats
-
Sep 24, 1991
Grant Date -
N/A
app pub date -
Aug 3, 1989
filing date -
Aug 3, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A mobile injector system with a CVD door assembly including flexible tubing secured to the door, a hole for accommodating a SiC or like paddle, and an injector clamp securing the injector tubes to the paddle. The CVD door assembly mates to a gas ring. A gas inlet channel extends through the CVD door assembly to communicate with the flexible tubing and with the injector tubes. The gas ring secures to a back ring and over and about an annular flange on the end of a process tube. Gas inlet channels extend through the gas ring to connect to gas inlet couplings to communicate with gas inlet ports in the CVD door. The injector tubes are in a predetermined geometrical proximity to the paddle, and provide for repeatability of processes for the semiconductor wafers or substrates.
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