Apparatus and method of pattern detection based on a scanning transmission electron microscope
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United States of America Patent
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Sep 24, 1991
Grant Date -
N/A
app pub date -
Jun 28, 1989
filing date -
Jul 1, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A pattern detection apparatus based on a scanning transmission electron microscope having an electron gun for generating and accelerating an electron beam, a plurality of convergent lenses for converging the electron beam, a deflection circuit for deflecting the electron beam so that it scans an object to be inspected, such as an X-ray mask, a detection circuit which receives electrons that have been dispersed and transmitted in the object and converts the detected electrons into an electrical signal, and an image forming circuit which forms a detected image of the object under test in response to the detected signal from the detection circuit and in synchronism with the deflection signal applied to the deflection circuit.
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