Semiconductor wafer orientation device
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United States of America Patent
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-
Oct 1, 1991
Grant Date -
N/A
app pub date -
Dec 20, 1988
filing date -
Dec 20, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A device having a circled array of tapered motor driven rollers center and find the flat edge of a semiconductor wafer by rotating the wafer until the flat edge is over a photo cell, at which time finder rollers secure the wafer in its centered and orientated position.
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