Microvalve
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United States of America Patent
Stats
-
Oct 8, 1991
Grant Date -
N/A
app pub date -
May 23, 1990
filing date -
May 29, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A valve plate (14) provided with slot-like valve ports (16) is able to slide between two stationary valve plates (10 and 12) which are joined with each other and are provided with corresponding slot-like valve ports (16). A electrostatic drive is integrated in the valve plates (10, 12 and 14). It consists of strip-like electrodes (20 and 22) which are arranged opposite to corresponding electrodes of another valve plate. By the application of suitable actuating potentials with the same or opposite polarity to the electrodes of different valve plates the actuating forces may be produced, which are needed for moving the movable valve plate (14).
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