Thermally-actuated microminiature valve
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United States of America Patent
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Oct 22, 1991
Grant Date -
N/A
app pub date -
May 8, 1991
filing date -
May 8, 1991
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A microminiature valve having radially spaced, layered spider legs, with each leg having first and second layers of materials having substantially different coefficients of thermal expansion. The legs include heating elements and are fixed at one end to allow radial compliance as selected heating of the legs causes flexure. Below the legs is a semiconductor substrate having a flow orifice aligned with a valve face. Flexure of the legs displaces the valve face relative to the flow orifice, thereby controlling fluid flow through the orifice.
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